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(adsbygoogle = window.adsbygoogle || []).push({}); Atomic layer deposition (ALD) technology is a self-limiting ultrathin film deposition method. In ALD reactions, the reaction temperature plays a key role. And generalized predictive control (GPC) algorithm is adopted to control the temperatur...
(adsbygoogle = window.adsbygoogle || []).push({}); Probe-based memory devices using ferroelectric media have the potential to achieve ultrahigh data-storage densities under high write-read speeds. However, the high-speed scanning operations over a device lifetime of 5-10 years, which correspo...
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1.原子层沉积工艺
原子层沉积技术（atomic layer deposition, ALD）已经逐渐成为了一项沉积功能薄膜的重要技术。该技术可以在纳米级尺度上精确控制物质成分和形貌，它可以将被沉积物质以单原子膜的形式一层一层的镀在基底表面。原子层沉积的过程是通过...
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